Simulation of pulse height spectra in ion beam induced charge microscopy of polycrystalline silicon
- 15 July 1997
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 82 (2) , 742-747
- https://doi.org/10.1063/1.365768
Abstract
No abstract availableThis publication has 11 references indexed in Scilit:
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