Structure and properties of Al-1%Si thin films on Si as a function of gas impurities during DC magnetron-sputtered deposition
- 1 July 1989
- journal article
- Published by Springer Nature in Journal of Electronic Materials
- Vol. 18 (4) , 517-525
- https://doi.org/10.1007/bf02657782
Abstract
No abstract availableKeywords
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