Evidence for two distinct defects contributing to theH4deep-level transient spectroscopy peak in electron-irradiated InP

Abstract
Deep-level transient spectroscopy (DLTS) has been used to study the dominant deep-level H4 produced in InP by electron irradiation. The characteristics of the H4 peak in Zn-doped InP has been studied as a function of pulse duration (tp) before and after annealing. Our results show that at least two traps contribute to the H4 peak: one is a fast trap (labeled H4F) and the other is a slow trap (labeled H4S). This is shown through several results concerning the activation energy, the capture cross section, the full width at half-maximum, and the peak temperature shift. It is shown that both traps are irradiation defects created in the P sublattice.