Auger and X-ray photoelectron spectroscopy studies of preferential sputtering in Y2O3-doped ZrO2 films
- 1 March 1979
- journal article
- Published by Elsevier in Chemical Physics Letters
- Vol. 62 (1) , 46-50
- https://doi.org/10.1016/0009-2614(79)80410-8
Abstract
No abstract availableKeywords
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