SiC thin film thermistor
- 1 March 1985
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 125 (3-4) , 355-359
- https://doi.org/10.1016/0040-6090(85)90244-5
Abstract
No abstract availableKeywords
This publication has 14 references indexed in Scilit:
- Effects of nitrogen on the electrical properties of sputtered SiCx filmsThin Solid Films, 1983
- SiC thin-film thermistorJournal of Physics E: Scientific Instruments, 1982
- Effects of Target Materials on the Structural Properties of Sputtered SiC FilmsJournal of the Electrochemical Society, 1980
- Highly-reliable temperature sensor using rf-sputtered SiC thin filmReview of Scientific Instruments, 1979
- The structure of chemical vapor deposited silicon carbideThin Solid Films, 1977
- Electrical and optical properties of amorphous silicon carbide, silicon nitride and germanium carbide prepared by the glow discharge techniquePhilosophical Magazine, 1977
- Thin‐film platinum resistance thermometers: Fabrication and useJournal of Vacuum Science and Technology, 1977
- Thin film thermistorsJournal of Physics E: Scientific Instruments, 1975
- LOW-TEMPERATURE EPITAXY OF β-SiC BY REACTIVE DEPOSITIONApplied Physics Letters, 1970
- Preparation and Properties of Noncrystalline Silicon Carbide FilmsJournal of Applied Physics, 1968