Evaluation of growth temperature, refractive index, and layer thickness of thin ZnTe, MnTe, and CdTe films by in situ visible laser interferometry
- 22 August 1994
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 65 (8) , 998-1000
- https://doi.org/10.1063/1.112174
Abstract
The experimental procedure and the results of in situ determination of growth temperatures, refractive indices at growth temperatures, and thicknesses of ZnTe, cubic MnTe, and CdTe thin films grown by molecular beam epitaxy (MBE) are reported. Visible laser interferometry with He-Ne laser 0.6328-μm light has been applied in the performed experiments. A 290-μm-thick plane-parallel GaP wafer polished to an optical finish on both sides has been used as a growth temperature calibration standard. The exemplary substrate temperature calibration curves, as well as the data gained at dynamic thermal conditions are presented and discussed. The following numerical values concerning refractive indices n at elevated temperatures have been evaluated from experimental data for the MBE grown films: n (286 °C)ZnTe=2.51, n (175 °C)ZnTe=2.49, n(286 °C)cubic MnTe=3.26, and the extinction coefficient k (286 °C)CdTe=0.23.Keywords
This publication has 14 references indexed in Scilit:
- Real-time determination of the direction of wafer temperature change by spatially resolved infrared laser interferometric thermometryJournal of Vacuum Science & Technology A, 1993
- Method to calculate substrate temperature during intermittent radiant heating in vacuumJournal of Vacuum Science & Technology A, 1993
- In situ real-time determination of the free-carrier density in doped ZnSe films during molecular beam epitaxial growthApplied Physics Letters, 1992
- Dynamic optical reflectivity to monitor the real-time metalorganic molecular beam epitaxial growth of AlGaAs layersApplied Physics Letters, 1991
- Reflectance-difference detection of growth oscillationsJournal of Crystal Growth, 1990
- Infrared-laser interferometric thermometry: A nonintrusive technique for measuring semiconductor wafer temperaturesJournal of Vacuum Science & Technology A, 1990
- Optical Investigation on the Growth Process of GaAs during Migration-Enhanced EpitaxyJapanese Journal of Applied Physics, 1989
- Optical reflectance and electron diffraction studies of molecular-beam-epitaxy growth transients on GaAs(001)Physical Review Letters, 1987
- I n s i t u spectroscopic ellipsometry during molecular-beam epitaxy of cadmium mercury tellurideJournal of Vacuum Science & Technology A, 1987
- Molecular beam epitaxy of semiconductor, dielectric and metal filmsVacuum, 1986