Sputterring and smoothing of metal surface with energetic gas cluster beams
- 31 July 1998
- journal article
- Published by Elsevier in Materials Chemistry and Physics
- Vol. 54 (1-3) , 234-237
- https://doi.org/10.1016/s0254-0584(98)00032-7
Abstract
No abstract availableThis publication has 11 references indexed in Scilit:
- Computer simulation of crystal surface modification by accelerated cluster ion impactsNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1997
- Sputtering of elemental metals by Ar cluster ionsNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1997
- Surface processing by gas cluster ion beams at the atomic (molecular) levelJournal of Vacuum Science & Technology A, 1996
- A short review of ionized cluster beam technologyNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1995
- Surface modification with gas cluster ion beamsNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1993
- Kinetic growth with surface relaxation: Continuum versus atomistic modelsPhysical Review Letters, 1991
- Thermodynamical and structural properties of f.c.c. transition metals using a simple tight-binding modelPhilosophical Magazine A, 1989
- Hydrodynamical analysis of non-linear sputtering yieldsSurface Science, 1981
- Sputtering from elastic-collision spikes in heavy-ion-bombarded metalsJournal of Applied Physics, 1981
- Theory of Thermal GroovingJournal of Applied Physics, 1957