Measurement of gigawatt radiation pulses from a vacuum and extreme ultraviolet free-electron laser
- 30 September 2003
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 83 (14) , 2970-2972
- https://doi.org/10.1063/1.1614417
Abstract
In order to measure the photon flux of highly intense and extremely pulsed vacuum ultraviolet (VUV) and extreme ultraviolet(EUV)radiation in absolute terms, we have developed a gas-monitor detector which is based on the atomic photoionization of a rare gas at low particle density. The device is indestructible and almost transparent. By first pulse-resolved measurements of VUVfree-electron laserradiation at the TESLA test facility in Hamburg, a peak power of more than 100 MW was detected. Moreover, the extended dynamic range of the detector allowed its accurate calibration using spectrally dispersed synchrotron radiation at much lower photon intensities.Keywords
This publication has 15 references indexed in Scilit:
- High-power EUV lithography sources based on gas discharges and laser-produced plasmasPublished by SPIE-Intl Soc Optical Eng ,2003
- Metrology of pulsed radiation for 157-nm lithographyApplied Optics, 2002
- Multiple ionization of atom clusters by intense soft X-rays from a free-electron laserNature, 2002
- Ultraviolet upsetNature, 2002
- Generation of GW Radiation Pulses from a VUV Free-Electron Laser Operating in the Femtosecond RegimePhysical Review Letters, 2002
- Free-Electron Lasers: Status and ApplicationsScience, 2001
- Potential for biomolecular imaging with femtosecond X-ray pulsesNature, 2000
- Advanced F 2 lasers for microlithographyPublished by SPIE-Intl Soc Optical Eng ,2000
- PtSi–n–Si Schottky-barrier photodetectors with stable spectral responsivity in the 120–250 nm spectral rangeApplied Physics Letters, 1996
- Absolute Intensity Measurements in the Vacuum Ultraviolet*†Journal of the Optical Society of America, 1964