Characteristics and peculiarities of surface processing by gas cluster ion beams
- 1 May 1996
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 112 (1-4) , 242-247
- https://doi.org/10.1016/0168-583x(95)01227-3
Abstract
No abstract availableKeywords
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- Light ion sputtering for H, D and He in the energy range of 25 keV to 100 keVJournal of Nuclear Materials, 1982