A comparative study on reactive and non-reactive unbalanced magnetron sputter deposition of TiN coatings
- 6 September 2002
- journal article
- Published by Elsevier
- Vol. 415 (1-2) , 151-159
- https://doi.org/10.1016/s0040-6090(02)00511-4
Abstract
No abstract availableKeywords
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