Electron-beam deposition of ZrO2-SnO2 films
- 1 March 1994
- journal article
- research article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 63 (3) , 155-157
- https://doi.org/10.1016/0257-8972(94)90092-2
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
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- e −-beam deposition of In2O3 stabilized ZrO2 filmsJournal of Vacuum Science & Technology A, 1991
- e −-beam deposition of ZrO2-Sc2O3 filmsJournal of Applied Physics, 1990
- Phase stability ofthin films deposited by magnetron sputteringPhysical Review B, 1989
- The crystal structure of tetragonal ZrO2Acta Crystallographica, 1962