The characterization of CVD single-crystal silicon on insulators: Heteroepitaxy and epitaxial lateral overgrowth
- 2 December 1983
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 65 (1-3) , 415-438
- https://doi.org/10.1016/0022-0248(83)90083-0
Abstract
No abstract availableKeywords
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