Properties of polycrystalline silicon films prepared from fluorinated precursors
- 1 January 1999
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 337 (1-2) , 7-11
- https://doi.org/10.1016/s0040-6090(98)01166-3
Abstract
No abstract availableThis publication has 15 references indexed in Scilit:
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