Wavy steps on Si(001)

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Abstract
Using low-energy electron microscopy we have found a new phase transition on the Si(001) surface at miscut angles smaller than ∼0.1°. The surface phase separates into facets with ∼300 Å terrace width, and regions with much larger, wavy terraces. This wavy phase is stabilized by a reduction of surface-stress-induced strain energy. A theoretical study by Tersoff and Pehlke compares favorably with our observations.