The effect of interfacial traps on the stability of insulated gate devices on InP
- 1 January 1983
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 54 (1) , 260-267
- https://doi.org/10.1063/1.331695
Abstract
Measurements of the change in channel current with time following application of a step voltage to the input of enhancement-mode insulated gate Field-Effect Transistors (FETs) on InP are reported. The data indicate that, following an initial steady-state period, the current varies exponentially with inverse temperature and logarithmically with time. This behavior suggests that a thermally activated tunneling process is responsible for the drift in these structures but leaves unanswered the question of the origin of the states responsible. It does appear, however, that, whereas its complete removal may be counterproductive, the proper preparation of the native oxide layer beween the InP and the deposited dielectric may be determinative in the establishment of a low-trap density interface.This publication has 24 references indexed in Scilit:
- Plasma-enhanced chemical vapor deposited SiO2/InP interfaceJournal of Applied Physics, 1982
- Current drifting behaviour in InP MISFET with thermally oxidised InP/InP interfaceElectronics Letters, 1981
- Electrical properties of SiO2 and Si3N4 dielectric layers on InPJournal of Vacuum Science and Technology, 1981
- Slow Current-Drift Mechanism in n-Channel Inversion Type InP-MISFETJapanese Journal of Applied Physics, 1980
- A D.C. to 16 GHz indium phosphide MISFETSolid-State Electronics, 1980
- Inversion layers on InPJournal of Vacuum Science and Technology, 1979
- Determination of distributed fixed charge in CVD-oxide and its virtual elimination by use of HClSolid-State Electronics, 1979
- InP–SiO 2 m.i.s. structure with reduced interface state density near conduction bandElectronics Letters, 1978
- Slow states in InSb/SiOx thin film transistorsSolid-State Electronics, 1975
- Drift phenomena in CdSe thin film FET'sSolid-State Electronics, 1967