Determination of distributed fixed charge in CVD-oxide and its virtual elimination by use of HCl
- 31 March 1979
- journal article
- Published by Elsevier in Solid-State Electronics
- Vol. 22 (3) , 303-309
- https://doi.org/10.1016/0038-1101(79)90040-6
Abstract
No abstract availableKeywords
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