Ion-beam direct-write mechanisms in palladium acetate films
- 1 August 1989
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 66 (3) , 1403-1410
- https://doi.org/10.1063/1.344444
Abstract
Pd features have been fabricated by high-energy ion irradiation (2-MeV He+, 2-MeV Ne+, and 20-keV Ga+ ions) of thin palladium acetate films. 2-MeV He+ irradiation produces smooth metallic-looking features that contain up to 30% of the original carbon and 5% of the original oxygen content of the film. Films irradiated with 2-MeV Ne+ ions contain slightly lower amounts of carbon and oxygen residues, but the films’ appearance varied with thickness. Exposures made with a 20-keV Ga+ ion beam, focused to a 0.2-μm spot, produce features with carbon and oxygen contents higher than those found with He+ and Ne+ exposures. Heating the ion-beam-defined palladium features in a hydrogen ambient reduces the carbon and oxygen contents and improves the electrical conductivity. Decomposition mechanisms and comparisons with laser direct writing are discussed.This publication has 17 references indexed in Scilit:
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