Modelling of silicon hydride clustering in a low-pressure silane plasma
- 17 October 2000
- journal article
- Published by IOP Publishing in Journal of Physics D: Applied Physics
- Vol. 33 (21) , 2731-2746
- https://doi.org/10.1088/0022-3727/33/21/311
Abstract
No abstract availableThis publication has 41 references indexed in Scilit:
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