Particle–particle interactions in dusty plasmas
- 1 March 1993
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 73 (5) , 2160-2162
- https://doi.org/10.1063/1.353117
Abstract
High densities of submicron particles have been created in an Ar/SiH4 parallel plate radio‐frequency (rf) discharge. The particles were collected and measured by electron microscopy and the mean particle diameter was found to be 230±60 nm. Laser scattering from the dense clouds of such particles showed that the concentration was 1×108 cm−3. A laser Doppler anemometer was used to measure the particle velocity distribution and hence the mean particle mass. This is consistent with the specific density of the hydrogenated amorphous silicon. The mean velocities of particles were measured at two different gas flows when the discharge was extinguished, so that the particles are neutral and do not interact, and the particles move with the gas velocity. However, during the discharge the particles have almost no mean axial velocity, even though the gas flow is as large as before. This is due to the strong interparticle interactions that keep the particle cloud, as a whole, stationary. The charge on the particles is estimated, leading to a value of the Coulomb coupling parameter of Γ=10. This large value suggests that the particle cloud can be viewed as a Coulomb liquid.This publication has 12 references indexed in Scilit:
- Measurements of particle size kinetics from nanometer to micrometer scale in a low-pressure argon-silane radio-frequency dischargeApplied Physics Letters, 1992
- Electrostatic trapping of contamination particles in a process plasma environmentApplied Physics Letters, 1991
- Particle generation and behavior in a silane-argon low-pressure discharge under continuous or pulsed radio-frequency excitationJournal of Applied Physics, 1991
- I n s i t u laser diagnostic studies of plasma-generated particulate contaminationJournal of Vacuum Science & Technology A, 1989
- Dusty plasmas in the solar systemReviews of Geophysics, 1989
- Effects of low-frequency modulation on rf discharge chemical vapor depositionApplied Physics Letters, 1988
- Coulomb solid of small particles in plasmasPhysics of Fluids, 1986
- Strongly coupled plasmas: high-density classical plasmas and degenerate electron liquidsReviews of Modern Physics, 1982
- Notes on constricted and unstable positive columns in electronegative gases†International Journal of Electronics, 1968
- A New Type of Electric Discharge: the Streamer DischargeScience, 1924