Focused ion beam sputter yield change as a function of scan speed
- 1 November 1997
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 15 (6) , 2346-2349
- https://doi.org/10.1116/1.589643
Abstract
No abstract availableKeywords
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- Microstructuring of gold on x-ray masks with focused Ga+ ion beamsPublished by SPIE-Intl Soc Optical Eng ,1990
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- The influence of non-uniform incident flux upon surface erosion processesJournal of Materials Science, 1979