Microwave ion source with linear antennaea)

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Abstract
A microwave ion source equipped with two linear antennae set parallel to the wall of the source chamber has been designed and built. A homogeneous plasma of Ar was produced in an aluminum chamber of 22 cm long, 9 cm wide, and 6 cm deep. Beam forming grids produced a rectangular beam of 17 cm by 3 cm. The current density of the extracted Ar+ beam was 0.16 mA/cm2 at the center of the extraction area when the input power to the magnetrons was 360 W. The energy distribution function of the extracted ions was measured with an electrostatic analyzer. The measured energy distribution showed a presence of high energy ions in the extracted beam.