Influence of the heat transfer from the cathode on the dependence of cathode sputtering rate on current and pressure in a glow discharge†

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Abstract
On the basis of some theoretical predictions it is shown experimentally that, there is a substantial influence of heat, transfer from the cathode on the relation of cathode sputtering rate W to discharge current I and gas pressure p. The connections are well approximated with power functions W ∼ I m and W ∼ p −1. The measurements were curried out with similar experimental devices differing only in the construction of the cathode parts, so as to give different heat transfers from the cathode. Good agreement between the theoretical predictions and the experimental results is obtained for m and l. Experimental data for W(I) and W(p) for the practically important combination of iron cathode and Penning gas mixture 99% Ne + 1% Ar were obtained in the pressure range p = 1[sdot]5–31 Torr. It is shown that there are relations m(p) and l(I) whoso variation agrees well with the theoretical predictions made.

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