Mev helium ion beam etching of polytetrafluoroethylene
- 1 May 1988
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 32 (1-4) , 142-144
- https://doi.org/10.1016/0168-583x(88)90197-8
Abstract
No abstract availableThis publication has 5 references indexed in Scilit:
- MeV proton backscattering analysis of ion implanted polymersNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1986
- Hydrogen profile in ion implanted polyethyleneApplied Physics Letters, 1985
- Secondary ion yields of polymersApplied Surface Science, 1985
- Directed ion beam sputter etching of polytetrafluoroethylene (Teflon) using an argon ion sourceThin Solid Films, 1982
- Ion-beam etching and sputtering of polytetrafluoroethylene (PTFE)Thin Solid Films, 1974