Synthesis of plasma-polymerized hexamethyldisiloxane (HMDSO) films by microwave discharge

This publication has 10 references indexed in Scilit:

• Investigation of plasma surface cleaning in planar low-pressure microwave discharges
  Surface and Coatings Technology, 1995
• Mass and optical emission spectroscopy of plasmas for diamond synthesis
  Pure and Applied Chemistry, 1994
• Temperature Distributions Across the Plasma Layer of Planar Low Pressure Microwave Plasmas — A Comparative Investigation by Optical Emission Spectroscopy
  Contributions to Plasma Physics, 1994
• Comparison of microwave and r.f. plasmas: fundamentals and applications
  Surface and Coatings Technology, 1993
• Large Area Planar Microwave Plasmas
  Published by Springer Nature ,1993
• Plasma diamond deposition from CH4H2(O2Ar) in relation to kinetic calculations
  Diamond and Related Materials, 1992
• Plasma deposited thin films suitable as moisture sensors
  Journal of Materials Science, 1991
• Abscheidung von Glimmpolymerschichten in einem weiten Metallrezipienten und Untersuchungen zur Struktur
  Contributions to Plasma Physics, 1984
• Untersuchungen zur chemischen Struktur von Glimmpolymerschichten aus Hexamethyldisiloxan (HMDS)
  Contributions to Plasma Physics, 1977
• The Polymerization of Benzene in a Radiofrequency Discharge
  Published by American Chemical Society (ACS) ,1969