Untersuchungen zur chemischen Struktur von Glimmpolymerschichten aus Hexamethyldisiloxan (HMDS)
- 1 January 1977
- journal article
- Published by Wiley in Contributions to Plasma Physics
- Vol. 17 (2) , 121-134
- https://doi.org/10.1002/ctpp.19770170206
Abstract
No abstract availableKeywords
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