Etched-wall bent-guide structure for integrated optics in the III-V semiconductors
- 1 February 1984
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Journal of Lightwave Technology
- Vol. 2 (1) , 31-34
- https://doi.org/10.1109/jlt.1984.1073571
Abstract
Bent-guide structures will undoubtedly play an important role in increasing packing density in future integrated optical circuits. A method for forming bends in waveguides in III-V semiconductors by reflection off an etched vertical wall is proposed for providing wave-guiding through 90° with negligible loss.Keywords
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