The deposition and microstructure of broad beam, ion sputtered titanium nitride coatings
- 1 March 1991
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 197 (1-2) , 293-302
- https://doi.org/10.1016/0040-6090(91)90240-x
Abstract
No abstract availableKeywords
This publication has 28 references indexed in Scilit:
- Cross-sectional transmission electron microscopy of the interfaces between physical vapor deposited TiNx coatings and steel substratesJournal of Vacuum Science & Technology A, 1989
- Preparation of TiN thin films by the dynamic mixing method using an N2+ ion beam of 1 keVThin Solid Films, 1989
- Tribological behaviour of TiN Films deposited by high energy ion-beam-assisted depositionSurface and Coatings Technology, 1988
- Plasma-assisted chemical vapour deposition of TiN and TiC on steel: Properties of coatingsThin Solid Films, 1988
- Summary Abstract: Friction and wear studies of titanium nitride films formed by reactive deposition in ultrahigh vacuumJournal of Vacuum Science & Technology A, 1988
- Ion beam modification of TiN films during vapor depositionMaterials Science and Engineering, 1987
- Material selection for hard coatingsJournal of Vacuum Science & Technology A, 1986
- Friction and wear reduction in tool steel by ion beam enhanced TiN depositionJournal of Vacuum Science & Technology A, 1986
- Deposition of TiN and Ti(O,C,N) hard coatings by a plasma assisted chemical vapor deposition processJournal of Vacuum Science & Technology A, 1986
- Composition, morphology and mechanical properties of plasma-assisted chemically vapor-deposited TiN films on M2 tool steelThin Solid Films, 1986