Microfabricated silicon coaxial field sensors for near-field scanning optical and microwave microscopy
- 1 December 2002
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 102 (1-2) , 185-194
- https://doi.org/10.1016/s0924-4247(02)00341-2
Abstract
No abstract availableKeywords
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