Dry etch damage and its effect on electronic and optical nanostructures
- 31 December 1990
- journal article
- Published by Elsevier in Superlattices and Microstructures
- Vol. 7 (4) , 381-385
- https://doi.org/10.1016/0749-6036(90)90230-5
Abstract
No abstract availableFunding Information
- Science and Engineering Research Council
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