Characterization of SiN thin films with spectroscopic ellipsometry
- 1 April 1993
- journal article
- Published by Elsevier in Physica B: Condensed Matter
- Vol. 185 (1-4) , 342-347
- https://doi.org/10.1016/0921-4526(93)90258-8
Abstract
No abstract availableKeywords
Funding Information
- European Commission
- General Secretariat for Research and Technology
- Life Sciences Institute (E 1-0018-D(B))
- Bundesministerium für Forschung und Technologie
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