Ion Implantation System Concepts
- 1 January 1982
- book chapter
- Published by Springer Nature
Abstract
No abstract availableKeywords
This publication has 15 references indexed in Scilit:
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- Features of a high-current implanter and a medium-current implanterJournal of Vacuum Science and Technology, 1976
- Thermal Conductivity of Silicon from 300 to 1400°KPhysical Review B, 1963
- A new ion source for electromagnetic isotope separatorsNuclear Instruments and Methods, 1963