The Sputter Deposition of Metal Multilayers
- 1 January 1987
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 10 references indexed in Scilit:
- Differential scanning calorimetry study of solid-state amorphization in multilayer thin-film Ni/ZrApplied Physics Letters, 1987
- Solid-state reaction and structure in compositionally modulated zirconium-nickel and titanium-nickel filmsPhysical Review B, 1986
- Applications of Monte Carlo simulation in the analysis of a sputter-deposition processJournal of Vacuum Science & Technology A, 1986
- Soft X-ray Platinum-Carbon Multilayer MirrorsPublished by SPIE-Intl Soc Optical Eng ,1986
- Design And Fabrication Of Carbon-Tungsten Multilayers Using EllipsometryPublished by SPIE-Intl Soc Optical Eng ,1985
- Determination Of Thickness Errors And Boundary Roughness From The Measured Performance Of A Multilayer CoatingPublished by SPIE-Intl Soc Optical Eng ,1985
- Target erosion and deposition rates in planar magnetron sputteringJournal of Vacuum Science & Technology A, 1984
- Calculations of thermalization during the sputter deposition processVacuum, 1984
- The thermalization of energetic atoms during the sputtering processJournal of Vacuum Science & Technology A, 1984
- Structure and physical properties of sputtered metallic superlatticesSurface Science, 1982