Preparation of YBaCuO Thin Film dc SQUID
- 1 June 1988
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 27 (6A) , L1110
- https://doi.org/10.1143/jjap.27.l1110
Abstract
This paper discusses the preparation of thin oxide film dc SQUIDs (Superconducting Quantum Interference Devices). A c-axis oriented, 600 nm-thick polycrystalline as-grown superconducting Y-Ba-Cu-O thin film, which was deposited on a (100) SrTiO3 single crystal, was used. An Ar ion milling technique has successfully been applied for patterning the 5∼20 µm wide microbridge without causing damage to the film. The modulation of the critical current has been clearly observed from 4.2 K to slightly higher than 40 K.Keywords
This publication has 7 references indexed in Scilit:
- Reactive ion beam etching of Y-Ba-Cu-O superconductorsApplied Physics Letters, 1988
- DC-SQUID with High-Critical-Temperature Oxide-Superconductor FilmJapanese Journal of Applied Physics, 1987
- Nb-Oxide-Pb Tunnel Junctions Fabricated Using CF4 Cleaning Process. (III) Preparation of Planar dc SQUIDJapanese Journal of Applied Physics, 1987
- Quantum interference devices made from superconducting oxide thin filmsApplied Physics Letters, 1987
- Synthesis of Y-Ba-Cu-O Thin Films on Sapphire Substrates by RF Magnetron SputteringJapanese Journal of Applied Physics, 1987
- Largely Anisotropic Superconducting Critical Current in Epitaxially Grown Ba2YCu3O7-y Thin FilmJapanese Journal of Applied Physics, 1987
- Tunneling Between SuperconductorsPhysical Review Letters, 1963