XPS study of a-SixOy:H and a-SixNy:H thin films
- 1 September 1988
- journal article
- Published by Elsevier in Applied Surface Science
- Vol. 33-34, 784-791
- https://doi.org/10.1016/0169-4332(88)90381-9
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
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