Material properties and tribological performance of rf-PECVD deposited DLC coatings
- 1 August 1998
- journal article
- Published by Elsevier in Diamond and Related Materials
- Vol. 7 (8) , 1100-1107
- https://doi.org/10.1016/s0925-9635(98)00159-9
Abstract
No abstract availableKeywords
This publication has 30 references indexed in Scilit:
- Carbon Thin FilmsPublished by Taylor & Francis ,2018
- Deposition of diamond-like carbon film in CH4He r.f. plasmaDiamond and Related Materials, 1995
- Contact start/stop characteristics on photolithographic magnetic recording mediaWear, 1994
- Structural modifications in a-C:H films doped and implanted with nitrogenDiamond and Related Materials, 1994
- A diamond-like carbon film for wear protection of steelSurface and Coatings Technology, 1993
- Influence of dc bias voltage on the refractive index and stress of carbon-diamond films deposited from a CH4/Ar rf plasmaJournal of Applied Physics, 1991
- The deposition and study of hard carbon filmsJournal of Applied Physics, 1989
- Characterization of diamondlike carbon films and their application as overcoats on thin-film media for magnetic recordingJournal of Vacuum Science & Technology A, 1987
- Diamondlike amorphous carbon films prepared by magnetron sputtering of graphiteJournal of Vacuum Science & Technology A, 1985
- rf-plasma deposited amorphous hydrogenated hard carbon thin films: Preparation, properties, and applicationsJournal of Applied Physics, 1983