Fabrication of ordered arrays of silicon nanopillars in silicon-on-insulator wafers
- 1 September 2001
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 57-58, 919-924
- https://doi.org/10.1016/s0167-9317(01)00457-9
Abstract
No abstract availableKeywords
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