Optical emission spectroscopy study toward high rate growth of microcrystalline silicon
- 1 May 2001
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 386 (2) , 256-260
- https://doi.org/10.1016/s0040-6090(00)01677-1
Abstract
No abstract availableThis publication has 11 references indexed in Scilit:
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