Deep acceptor states of platinum and iridium in4H-silicon carbide

Abstract
Band gap states of platinum and iridium in the hexagonal polytype 4H of silicon carbide are investigated by means of deep level transient spectroscopy (DLTS) in n- as well as p-type epitaxial layers. To establish a definite chemical assignment of band gap states to Pt and Ir the radioactive isotope P188t was incorporated into 4H-SiC samples by recoil implantation. During the nuclear decay of P188t via the unstable I188r to the stable O188s, the concentration of band gap states is traced by DLTS whereby characteristic concentration changes lead to an unambiguous assignment of two band gap states to P188t. The two levels are interpreted as one Pt-related defect structure with two different charge states in the band gap of 4H-SiC: a double-negative acceptor at 0.81eV and a single-negative acceptor at 1.47eV below the conduction band edge EC. Iridium was found to generate one acceptorlike state (EC0.82eV) in the band gap of 4H-SiC. Further, acceptor states at EC0.31eV, EC0.41eV, EC0.50eV and donor states at EV+0.60eV, EV+0.90eV, EV+1.09eV (EV is the valence band edge) are preliminarily assigned to defects involving osmium. It was found that recoil processes taking place during the nuclear decay may generate different complex structures related to Os. Therefore, the assignment to specific Os structures is not definite. The deep acceptor state of platinum is considered an interesting candidate for a compensating center close to the midgap position in