Measurement of electron densities by a microwave cavity method in 13.56-MHz RF plasmas of Ar, CF4, C2F6, and CHF3
- 1 September 1991
- journal article
- Published by Springer Nature in Plasma Chemistry and Plasma Processing
- Vol. 11 (3) , 357-370
- https://doi.org/10.1007/bf01458916
Abstract
No abstract availableKeywords
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