Low-pressure pyrolysis studies of a new phosphorus precursor: Tertiarybutylbis(dimethylamino)phosphine
- 1 September 1996
- journal article
- Published by Springer Nature in Journal of Electronic Materials
- Vol. 25 (9) , 1434-1438
- https://doi.org/10.1007/bf02655379
Abstract
No abstract availableKeywords
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