Metalorganic chemical vapor deposition of Tl2Ba2CaCu2Ox superconducting thin films using fluorinated β-diketonate source reagents
- 12 November 1990
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 57 (20) , 2136-2138
- https://doi.org/10.1063/1.104156
Abstract
Superconducting Tl2Ba2CaCu2Ox films were fabricated using a three‐step process. Amorphous BaCaCuOF films were deposited on MgO(100) single‐crystal substrates by metalorganic chemical vapor deposition at 500 °C using fluorinated β‐diketonate complexes of Ba, Ca, and Cu. The fluorine was stripped in wet oxygen at 785 °C and c‐axis oriented Tl2Ba2CaCu2Ox films were then formed by annealing in dry at 870 °C in the presence of Tl2O3/Ba2Ca2CuN3Ox pellets. The best films showed onsets of superconductivity at 125 K and zero resistivity was achieved by 108 K. Critical current densities as high as 104 A/cm2 were obtained at 90 K.Keywords
This publication has 10 references indexed in Scilit:
- Reduced Pressure MOCVD of C-Axis Oriented BiSrCaCuO Thin FilmsJapanese Journal of Applied Physics, 1990
- Growth of High T c YBaCuO Thin Films by Metalorganic Chemical Vapor DepositionPublished by SPIE-Intl Soc Optical Eng ,1990
- New hybrid physical vapor deposition/organometallic chemical vapor deposition route to high T c superconducting Tl-Ba-Ca-Cu-O thin filmsApplied Physics Letters, 1989
- The effects of substrate temperature on the superconducting properties of Tl2Ca2Ba2Cu3O10 films sputter-deposited from stoichiometric oxide targetsPhysica C: Superconductivity and its Applications, 1989
- Morphology control and high critical currents in superconducting thin films in the Tl-Ca-Ba-Cu-O systemPhysica C: Superconductivity and its Applications, 1989
- Preparation of superconducting Tl-Ca-Ba-Cu thin films by chemical depositionApplied Physics Letters, 1989
- Characterization of Y-Ba-Cu-O superconducting thin films prepared by coevaporation of Y, Cu, and BaF2Applied Physics Letters, 1989
- Highly oriented Tl2Ba2Ca2Cu3O10 thin films by pulsed laser evaporationApplied Physics Letters, 1989
- Superconducting thin films of Tl2Ca2Ba2Cu3Oy and Tl2CaBa2Cu2OyPhysica C: Superconductivity and its Applications, 1988
- Effect of the post-deposition processing ambient on the preparation of superconducting YBa2Cu3O7−x coevaporated thin films using a BaF2 sourceApplied Physics Letters, 1988