Deposition of thin metal and metal silicide films from the decomposition of organometallic compounds
- 30 April 1989
- journal article
- Published by Elsevier in Materials Science and Engineering: B
- Vol. 2 (4) , 297-323
- https://doi.org/10.1016/0921-5107(89)90007-x
Abstract
No abstract availableKeywords
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