Surface segregation effects on sputtering of AuAg alloy
- 31 January 1990
- journal article
- Published by Elsevier in Materials Science and Engineering: A
- Vol. 123 (1) , 53-58
- https://doi.org/10.1016/0921-5093(90)90209-l
Abstract
No abstract availableKeywords
This publication has 17 references indexed in Scilit:
- Angular resolved sputtering yields of noble metals and an Au–Ag alloySurface and Interface Analysis, 1989
- Measurement of angular distribution of noble metals by low keV ion sputteringSurface Science, 1988
- Mechanisms and theory of physical sputtering by particle impactNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1987
- Monte Carlo simulation of sputtering in AuCu alloys-simulation with formation of altered layer includedSurface Science, 1986
- Angular distribution of Ag atoms sputtered with A 5 keV Ar+ ion beamNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1986
- Effect of surface segregation on angular distributions of atoms sputtered from binary alloysJournal of Nuclear Materials, 1984
- Surface segregation during alloy sputtering and implantationNuclear Instruments and Methods in Physics Research, 1983
- Sputtering of multicomponent materials: Elements of a theoryNuclear Instruments and Methods in Physics Research, 1982
- Calculation of chemisorption and absorption induced surface segregationSurface Science, 1982
- Mass effects on angular distribution of sputtered atomsJournal of Applied Physics, 1979