High energy Au-implantation into silicon: Radiation damage and microscopical distribution of implanted atoms
- 1 June 1987
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 26 (4) , 551-556
- https://doi.org/10.1016/0168-583x(87)90541-6
Abstract
No abstract availableThis publication has 11 references indexed in Scilit:
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