PIG-Type Compact Microwave Metal Ion Source
- 1 February 1987
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 26 (2A) , L100
- https://doi.org/10.1143/jjap.26.l100
Abstract
A compact microwave metal ion source using PIG (Penning lonization Gauge) geometry has been newly developed. This modified PIG ion source introduces a microwave discharge and can generate stable and high density plasma. The size of the source is 60 mm in diameter and 80 mm long. The microwave discharge power is 20∼60 W at a frequency of 2.45 GHz. A tantulum ion beam current of 3.2 µA has been measured with the extraction aperture (2 mm diameter) at an extraction voltage of 13 kV.Keywords
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