Characterization of photosensitive hybrid sol-gel glass with high-energy beam-sensitive grey-scale mask in single-step fabrication of blazed gratings
- 20 November 2001
- journal article
- research article
- Published by IOP Publishing in Journal of Physics D: Applied Physics
- Vol. 34 (23) , L125-L128
- https://doi.org/10.1088/0022-3727/34/23/101
Abstract
A new photosensitive negative-tone inorganic-organic hybrid SiO2/TiO2 glass is investigated for fabrication of microoptical elements. The sol-gel material enjoys an advantage over the conventional photoresist-based fabrication techniques due to its single-step process without etching. The application of the high-energy beam-sensitive (HEBS) mask in the process provides a reliable and simple method for three-dimensional microoptical fabrications in a single UV exposure. The technique using the \mbox{sol-gel} material with the HEBS grey-scale mask has considerable potential for low-cost mass production of complex, multilevel, diffractive optical elements and microoptical structures.Keywords
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