Maskless Fabrication of High Quality DFB Laser Gratings by Laser Induced Chemical Etching
- 1 May 1985
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 24 (5A) , L294
- https://doi.org/10.1143/jjap.24.l294
Abstract
High quality submicron DFB laser gratings with 130 nm groove depth are fabricated without roughness on a grating surface by laser induced chemical etching. It is found that rigid configuration of an irradiation cell and directional etching performance of laser etching is very important to obtain high quality gratings.Keywords
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