New OMVPE reactor for large area uniform deposition of InP and related alloys
- 1 September 1989
- journal article
- Published by Springer Nature in Journal of Electronic Materials
- Vol. 18 (5) , 645-649
- https://doi.org/10.1007/bf02657480
Abstract
No abstract availableKeywords
This publication has 13 references indexed in Scilit:
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