Selective Reactive ION Etching Effects on GaAs/AlGaAs Modfets
- 1 January 1991
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
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- Effects of ion species and adsorbed gas on dry etching induced damage in GaAsJournal of Vacuum Science & Technology B, 1985
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- Selective Dry Etching of AlGaAs-GaAs HeterojunctionJapanese Journal of Applied Physics, 1981