A novel thick-film piezoelectric micro-generator
- 1 August 2001
- journal article
- research article
- Published by IOP Publishing in Smart Materials and Structures
- Vol. 10 (4) , 850-852
- https://doi.org/10.1088/0964-1726/10/4/403
Abstract
The use of alternative electrical energy sources to batteries is of particular significance to remote sensor systems. A vibration-powered micro-generator, based on a screen printed piezoelectric material, is proposed for this purpose. Theoretical and experimental results show that 2 µW can be generated for a vibration frequency of only 80 Hz. The device is not optimized and significant improvements are envisaged in the future.Keywords
This publication has 4 references indexed in Scilit:
- Design and fabrication of a micromachined silicon accelerometer with thick-film printed PZT sensorsJournal of Micromechanics and Microengineering, 2000
- An investigation into the effect of modified firing profiles on the piezoelectric properties of thick-film PZT layers on siliconMeasurement Science and Technology, 2000
- Thick-film sensors: past, present and futureMeasurement Science and Technology, 1997
- Analysis of a micro-electric generator for microsystemsSensors and Actuators A: Physical, 1996